AOI-LD420 model is a high-precision microscopic inspection system developed for visual inspection of laser chip. It is applied in defect inspection of the chip manufacturing process, improving the stability of the manufacturing process quality. This system is based on a precision motion system and vibration isolation platform, equipped with a nanometer-level optical positioning feedback system. The core vision system combines traditional algorithms with AI algorithms to improve process capabilities in the inspections of the AR surface, HR surface, P surface, and N surface. It can also identify chip serial number and output corresponding defect information.